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Virtual Lab: Minilab Overview
 University of Virginia
             
           
Pre-bake
Post-exposure bake
Photoresist
Exposure lamp
Microscope
Spinner
Si wafers
Pipette
Wafer
holder
Alignment screws

Mask holder
+ mask

HMDS
© 2003-Present, John C. Bean
 
The Photolithography Module is used to transfer a microphotographic image onto the silicon wafers. This image then determines where materials are added to or removed from the wafer to build up the computer chip.

This module includes enclosures for the HMDS wetting agent and photoresist, a spinner and its controls, pre-bake and post-bake hotplates, and the main lithography turntable. This turntable has mask and wafer holders, a microscope and a light source for photoresist exposure.



Move the mouse over labels on the left to see detailed descriptions of equipment.
 
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