We Can Figure This Out.org
Virtual Lab: Minilab Overview
 University of Virginia
             
           
© 2003-Present, John C. Bean
 
This provides the entire walk around of the MiniLab moving from:

- Oxidation furnace

- Photolithography station

- Photoresist develop and strip bench,

- Etch bench

- Doping furnace

- PVD metal evaporation chamber