The wafers are first stacked in the quartz "wafer boat." Pairs of silicon wafers are placed with their rough sides together. Their polished faces then face outwards towards boron nitride (BN) wafers which will provide the B doping atoms. The overall sequence is thus BN - Si - Si - BN - Si - Si - BN ...
Here, only a few wafers of silicon and boron nitride are shown for clarity. Tweezers are used for transferring wafers from the wafer box to the boat (neither wafers or quartz should ever be touched by bare hands).
