This webpage describes the Minilab furnace used to introduce electrically active "dopant" impurities into the silicon wafers.
To start this tour, click the "Next Scene" button at the bottom of this page.
To navigate further, use the buttons at the bottom of the page. (You can also move between scenes by using your keyboard’s arrows, and then play movies by clicking enter/return).
At any point, you can jump ahead by clicking an icon above the picture.
For links to an overview of the lab and pages on each piece of equipment, click on the "Related Pages" button above.
