Laser excites a plasma to create very short wavelength light Light is superimposed into one beam EUV light beam is projected onto the "mask." Light is bounced off mirrors to reduce the size of the image Pattern is scanned across the wafer
Laser excites a plasma to create very short wavelength light
Light is superimposed into one beam
EUV light beam is projected onto the "mask."
Light is bounced off mirrors to reduce the size of the image
Pattern is scanned across the wafer