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| PROJECT OVERVIEW: |
This "Virtual Lab" website was developed by John C. Bean. It began under a grant from the National Science Foundation's CCLI program, and grew under subsequent NIRT, MRSEC and NUE awards. It has now been combined with Bean's Nanoscience and Sustainable Energy websites to form WeCanFigureThisOut.org (about / contact).
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| SOFTWARE TOOLS: |
The Virtual Lab's animations were created using the program "3D Studio MAX." The website is built upon PHP programming calling upon MySQL databases. |
| PAGE CREDITS: |
This page was created by Niladri Kansari (M.S. 02) in consultation with Dr. Charles W. Gwyn of Intel Corp. and John C. Bean
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| LEARN MORE: |
"Extreme Ultraviolet Lithography," C. W. Gwyn, Journal of Vacuum Technology B, Volume 16, pp. 3142-49 (1998)
"Extreme Ultraviolet Lithography," Charles Gwyn et al., white paper available by contacting: EUV LLC, P.O. Box 969, MS-9911, Livermore, CA 94551-0969
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