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| PROJECT OVERVIEW: |
This "Virtual Lab" website was developed by John C. Bean. It began under a grant from the National Science Foundation's CCLI program, and grew under subsequent NIRT, MRSEC and NUE awards. It has now been combined with Bean's Nanoscience and Sustainable Energy websites to form WeCanFigureThisOut.org (about / contact).
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| SOFTWARE TOOLS: |
The Virtual Lab's animations were created using the program "3D Studio MAX." The website is built upon PHP programming calling upon MySQL databases. |
| PAGE CREDITS: |
This page was created by Niladri Kansari (M.S. 02) in consultation with Lloyd Harriott (then at Bell Labs, now at UVA) and John C. Bean
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| LEARN MORE: |
"New Approach to Projection-Electron Lithography with Demonstrated 0.1 Micron Linewidth," S.D. Berger & J.M. Gibson, Appl. Phys. Lett., Vol. 57, pp. 153-5 (1990)
"Scattering with Angular Limitation Projection Electron Beam Lithography for Suboptical Lithography," L.R. Harriott, J. Vacuum Sci. & Technol. B15, 2130-35 (1997)
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